Mask Fabrication Services
MRL Photomask Services are offered to the University of Illinois MRL Central Research Facliity community and also to external customers from both academia and industry. Our full services include imaging of data on photo sensitive glass.
You supply data in Microns only. All data must be in the positive quadrant from 0, 0. File format in either .DXF or .GDS.
Turnaround time is typically 1 working day after data is verified and accepted by the user.
Minimum line width: 3 microns
Minimum line width: 1.5- 2 microns
Largest die size: 9906 X 9906 microns
We offer 3x3, 4x4 and 5x5 FeO Soda Lime plates, and 4x4 and 5x5 Chrome Soda Lime plates. We do not stock quartz glass, but will image if supplied by the user. We ship photomasks by USPS Priority Mail to our outside customers.
For more information about MRL Photomask Services, please contact:
Room 380 MRL