Physical Electronics 660

Equipment Location: 
B06 MRL

 

The Physical Electronics model PHI 660 Scanning Auger Microprobe (SAM) has elemental mapping with high spatial resolution and is capable of performing scanning electron microscopy (SEM). The instrument is equipped with an in situ impact fracture stage for analysis of grain boundaries and other internal surfaces. Auger point analysis and scanning analysis can be performed with a spatial resolution down to 250 nm, while SEM resolution is around 100 nm. The Auger has a sputter ion gun for depth profiling analysis.

The PHI 660 features:

  • Elemental mapping with high spatial resolution and is capable of performing scanning electron microscopy (SEM)
  • Coaxial LaB6 Filament Electron Gun, ~100 nm Min. Spot Size for Auger Analysis, 0.5-20 KeV
  • Single Pass Cylindical Mirror Analyzer
  • Single Channel Electron Multiplier
  • Differentially Pumped 1-5 KeV Ar Ion Gun with Automatic Leak Valve
  • Attached UHV Chamber for Sample Fracture or Heating