Nordson March Reactive Ion Etch (RIE) Plasma System 1 & 2

Equipment Location: 
342 MRL

March CS-1701 reactive ion etcher is a bench-top system with water cooled RF platen. It is capable of etching photoresist, polymer and graphene.

This system could be operated under manual mode or auto mode.

march RIE

Features:

  • 400W, 13.56 MHz RF Generator with Automatic Matching Network
  • Delivers Excellent Process Repeatability.
  • Two MFC gas flow channels: O2 and CF4.
  • The March RIE 1/2 chamber is configured with a 7”/5” powered electrode to accommodate a wide range of wafer sizes.

Special Notes and Restrictions:

  • You must be qualified by staff to use this tool.
  • This tool is reserved for the following materials:photoresist, polymer and graphene.Etching of materials other than these requires prior authorization from staff.
  • When you are done with your work, always leave the chamber under vacuum. And never leave a dirty chamber for the next user.

Resources

Manufacturer's website: 
http://www.nordson.com/en/divisions/march/products/plasma-treatment-systems/rie-system