Hydrogen Vacuum Furnace – Max Temp. 1000°C

Equipment Location: 
322 MRL

The Hydrogen Vacuum Furnace is dedicated to annealing of materials under hydrogen and vacuum environment. Do not carry out graphene growth in this furnace.

Ultra-high purity hydrogen (H2) and Argon (Ar) are available for annealing of materials at temperatures up to 1000 Celsius. H2 flows can be controlled in the range of 0-100 sccm. The Ar flow can be controlled in a range of 0-1000 sccm. It is equipped with an oil-free pump to provide an oil-free environment for annealing processes.

No powdery samples are allowed in this furnace. Users must discuss with staff for sample compatibility.

Features:

  • Maximum temperature: 1000 Celsius
  • Multi ramping and soaking controls available
  • Tube type and size: Quartz Tube, 3 inch outside diameter
  • Available gases: Argon (Ar), Hydrogen (H2). All ultra-high purity
  • Flow rate control: Ar, 0-1000 sccm; H2, 0-100 sccm