Hitachi S-4700 High Resolution SEM

Equipment Location: 
0018 Supercon

The Hitachi S-4700 SEM features:

  • High Resolution Low Voltage Imaging
    •   2.5 nm resolution at 1 kV
    •   1.5 nm resolution at 15 kV
  • Centaurus BSE detector
  • iXRF EDS Elemental Analysis System with Oxford Instruments  (Si(Li) detector, ATW2 window, 10 mm2 detection area, 138 eV Resolution at 5.9 keV, Element Detection (Be-U))