Equipment List

Equipment Name Contact Location Technique(s)
Gatan 656 Dimple Grinder cqchen@illinois.edu B56 MRL
Gatan 656 Disc Grinder System cqchen@illinois.edu B56 MRL
GATAN Cryo Precision Ion Polishing System (Cryo-PIPS) cqchen@illinois.edu B59 MRL
Gatan Precision Etching Coating System (PECS) cqchen@illinois.edu B59
GATAN Precision Ion Polishing System (PIPS) cqchen@illinois.edu B59 MRL
Harrick Plasma Oxygen Cleaner xlwang84@illinois.edu 348 MRL
High Temperature CM furnace – max temperature 1600°C frao@illinois.edu 328 MRL
Hitachi H-9500 Dynamic Environmental TEM mabon@illinois.edu B66A MRL
Hitachi S-4700 High Resolution SEM zyw@illinois.edu 0018 Supercon
Hitachi S-4800 High Resolution SEM zyw@illinois.edu 0013 Supercon
Hysitron P195 In-Situ TEM Picoindenter cqchen@illinois.edu 0011 Supercon
Hysitron TI-950 Tribodenter jcspear@illinois.edu 0013 Supercon
J.A. Woollam VASE soares@illinois.edu 248 MRL
Jandel 4-Point Probe Sheet Resistance Measurement frao@illinois.edu 326 MRL
JEOL 2010 LAB6 TEM wswiech@illinois.edu 0017 Supercon
JEOL 2010F S(TEM) cqchen@illinois.edu 0026 Supercon
JEOL 2100 CRYO TEM wswiech@illinois.edu 0011 Supercon
JEOL 2200 FS (S)TEM mabon@illinois.edu B70C MRL
JEOL 7000F Analytical SEM mabon@illinois.edu 0020 Supercon
JEOL JSM-6060LV Low-Vacuum SEM zyw@illinois.edu 0021 Supercon
Keyence VK-X1000 3D Laser Scanning Confocal Microscope soares@illinois.edu 0022 Supercon
Kratos Axis ULTRA r-haasch@illinois.edu B81 MRL
Kurt J. Lesker Nano36 Thermal Evaporator System xlwang84@illinois.edu 348MRL
Laue System with Multiwire 2D Detector sardela@illinois.edu 148 MRL
Leica Cryo Ultramicrotome UC6/FC6 raremy@illinois.edu 0011 Supercon
Lindberg 2" Tube oxidation/annealing furnace frao@illinois.edu 328 MRL
Malvern Zetasizer raremy@illinois.edu 133 MRL
Metal Etchant Fume Hood xlwang84@illinois.edu 387 MRL
MJB3 Mask Aligner + Stamper Tool jeffg@illinois.edu 313 MRL
MJB4 Mask Aligner jeffg@illinois.edu 313 MRL