Transmission and Scanning Transmission Electron Microscopy

Staff Contacts:

Wacek Swiech
(217) 244-9532
wswiech@illinois.edu

Jim Mabon
(217) 333-4265
mabon@illinois.edu

CQ Chen
(217) 300-4837
cqchen@illinois.edu

Honghui Zhou
(217) 300-3934
hhzhou@illinois.edu

Background

Determine the microstructure of materials such as grain size, defect density and type, and dislocation distribution; study the local microstructure including heterointerface and individual nanostructures; examine crystalline and amorphous structures; determine the composition of materials from micrometer level down to atomic level. Six instruments with complementary capabilities include atomic resolution (0.19 nm) TEM and analytical scanning TEM with 0.2 nm beam for atomic number (Z-contrast) imaging, EDS, EELS and nanodiffraction. Traditional sample preparation such as ion millers, Cryo TEM with cryomicrotomy, vitreous ice sample preparation and cryo-transfer are also available.

Instrumentation for Transmission and Scanning Transmission Electron Microscopy

JEOL 2010F (S)TEM

General:
The 2010F is an energy filtering, field-emission analytic TEM/STEM. It is ideal for small probe work including: HAADF STEM, nanodiffraction, and spatially resolved EELS and EDS. It operates at 200kV and uses a Schottky field emitter. The 2010F is equipped with an energy filter to filter both images and diffraction patterns as well as act as a energy-loss spectrometer. The system is capable of EDS/EELS mapping, holography, and in-situ heating and cooling. Both intensified video rate and slow-scan CCD cameras are available. The system is controlled by the JEOL FasTEM system allowing total computer control of the system.

Location
0026 Materials Research Laboratory (217) 244-6116

Specifications:

  •     Cs = 1.0mm Cc = 1.4mm
  •     Energy 200kV
  •     Tilt 40 degrees on one axis and 30 degrees on the other
  •     HAADF Resolution = 0.18nm
  •     HREM Point resolution = 0.24nm
  •     Information Limit > 0.12nm
  •     Lens Type-Side entry (Condenser/Objective)
  •     Energy Spread 0.7eV

Attachments:

  •     Image Filter - Gatan Image Filter (GIF) 2001
  •     EDS - Oxford INCA 30mm ATW detector
  •     Digital Imaging - 1k CCD on GIF
  •     Digital Scan - Gatan Digiscan and Oxford INCA
  •     Video - Intensified off-axis and GIF cameras
  •     Computer Control - FasTEM
  •     Biprism
  •     HAADF Detector
  •     1000ºC double tilt holder
  •     Liquid N2 double tilt holder

JEOL 2100 Cryo TEM

Location
0011 Materials Research Laboratory (217) 244-0620

General:
The 2100 Cryo is a conventional TEM with large pole piece gap. It is optimized for BF/DF imaging, diffraction and high sample tilts. It operates at 200kV. The 2100 Cryo is equipped with a combined video rate/slow scan camera for real time imaging and final image recording. It has a low-dose mode. A high tilt is available with +/-70 degrees using a special tip for the single tilt holder. Cryo transfer stage, double tilt heating, and liquid N2 stages are available.

Specifications:

  •     Cs = 2.0mm
  •     Energy 200kV
  •     +/-70 degrees (special single tilt holder)
  •     Point resolution = 0.27nm
  •     Information Limit > 0.14nm
  •     Side Entry Goniometer - Cryo Pole Piece

Attachments:

  •     Digital Imaging - Gatan UltraScan 2kx2k CCD
  •     Computer Control - Digital Micrograph
  •     Free Lens Control
  •     Cryo transfer stage
  •     1000ºC double tilt holder
  •     Liquid N2 double tilt holder

JEOL 2010LaB6 TEM

Location
0017 Materials Research Laboratory (217) 244-0620

General:
The 2010LaB6 is a conventional TEM. It is optimized for BF/DF imaging, diffraction and high sample tilts. It operates at 200kV. The 2010LaB6 is equipped with a combined video rate/slow scan camera for real time imaging and final image recording. A double tilt holder is available with +/-45 degrees of tilt. Double tilt heating and liquid N2 stages are available.

Specifications:

  •     Cs = 1.4mm
  •     Energy 200kV
  •     Tilt 40 degrees on two axes
  •     Point resolution = 0.28nm
  •     Information Limit > 0.14nm
  •     Lens Type-Side entry (Condenser/Objective)

Attachments:

  •     Digital Imaging - Gatan MatScan1kx1k progressive scan CCD
  •     Computer Control - Digital Micrograph
  •     Free Lens Control
  •     1000ºC double tilt holder
  •     Liquid N2 double tilt holder

JEOL 2200FS (S)TEM

General:
The aberration-corrected JEM-2200FS, a state-of-the-art analytical electron microscope, is equipped with a 200kV field emission gun (FEG), a CEOS probe Cs-corrector, and an in-column energy filter (Omega Filter) that allows elemental analysis and chemical analysis of specimens. It is also equipped with an Energy Dispersive X-ray Spectrometer (EDS) and a CCD-camera. With an available small probe size of ~0.1 nm, atomic level high-resolution high-angle annular dark-field (Z-contrast) images, and high resolution EELS spectrum imaging can be obtained. With the low background Be specimen holder, large (50mm2) detector area, and the hard X-ray aperture, high-quality EDS analysis and mapping is available.

Location
B70C Materials Research Laboratory (217) 244-2137

Specifications:

  •     Cs = 0.5mm Cc = 1.1mm
  •     Energy 200kV
  •     Tilt 25 degrees on both axes
  •     HAADF Resolution = 0.1nm
  •     HREM Point resolution = 0.19nm
  •     Information Limit better than 0.1nm
  •     Sample loading-Side entry
  •     Energy Spread better than 0.8eV

Attachments:

  •     Corrector - CEOS Cs-corrector system
  •     Image Filter - In-column Omega Filter
  •     EDS - Oxford INCA 50mm2 detector
  •     Digital Imaging - 2k Gatan CCD
  •     Digital Scan - Gatan Digiscan
  •     Video - Hamamatsu cameras
  •     HAADF Detector
  •     BF Detector
  •     Low-background double tilt holder